臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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Institution	Date	Title	Author
國立交通大學	2014-12-08T15:49:17Z	TiSixOy as an absorptive shifter for embedded phase-shifting mask in 248 nm and the modification of R-T method for the determination of shifter's n and k	Loong, WA; Chen, CW; Chang, YH; Lin, CM; Cui, Z; Lung, CA
國立交通大學	2014-12-08T15:02:03Z	Study on optimization of annular off-axis illumination using Taguchi method for 0.35 mu m dense line/space	Loong, WA; Tseng, JC; Chen, TC; Lung, CA

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